NON-PLANAR CVD DIAMOND-COATED CMP PAD CONDITIONER AND METHOD FOR MANUFACTURING
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United States of America Patent
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Issued Date -
Sep 10, 2009
app pub date -
Mar 6, 2009
filing date -
Mar 10, 2008
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Abandoned
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Abstract
The present invention relates to a composite material having non-planar geometries and edge-shaving surfaces comprising a CVD diamond coating applied to a composite substrate made from a ceramic material and a preferably unreacted carbide-forming material of various configurations and for a variety of applications.
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