LARGE AREA THIN FILM CAPACITORS ON METAL FOILS AND METHODS OF MANUFACTURING SAME

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United States of America Patent

APP PUB NO 20090238954A1
SERIAL NO

12051931

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed are a method of making a dielectric on a metal foil, and a method of making a large area capacitor that includes a dielectric on a metal foil. A dielectric precursor layer and the base metal foil are prefired at a prefiring temperature in the range of 350 to 650° C. in a moist atmosphere that also comprises a reducing gas. The prefired dielectric precursor layer and base metal foil are subsequently fired at a firing temperature in the range of 700 to 1200° C. in an atmosphere having an oxygen partial pressure of less than about 10−6 atmospheres to produce a dielectric. The area of the capacitor made according to the disclosed method may be greater than 10 mm2, and subdivided to create a multiple individual capacitor units that may be embedded in printed wiring boards. The dielectric is typically comprised of crystalline barium titanate or crystalline barium strontium titanate.

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Patent Owner(s)

Patent OwnerAddress
CDA PROCESSING LIMITED LIABILITY COMPANY2711 CENTERVILLE ROAD SUITE 400 WILMINGTON DE 19808

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Borland, William Chapel Hill, US 15 111
Kim, Esther Cary, US 32 571
Palanduz, Cengiz Ahmet Durham, US 9 52
SUH, SEIGI Cary, US 31 908

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