Importance

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Abstract

Embodiments of the present invention relate to fabricating low cost polysilicon solar cell on flexible substrates using inkjet printing. Particular embodiments form polycrystalline or microcrystalline silicon solar cells on substrates utilizing liquid silane, by employing inkjet printing or other low cost commercial printing techniques including but not limited to screen printing, roller coating, gravure coating, curtain coating, spray coating and others. Specific embodiments employ silanes such as cyclopentasilane (C.sub.5H.sub.10) or cyclohexasilane (C.sub.6H.sub.12), which are liquids at room temperature but undergo a ring opening chemical reaction upon exposure to radiation of a wavelength of ultraviolet (UV) or shorter. . Opening of the rings of the liquid silane converts it into a polymerized material comprising saturated and unsaturated silicon chains of varied length. Heating to approximately 250-400.degree. C. converts these materials into a hydrogenated amorphous silicon film. Controlled annealing at higher effective temperatures causes the amorphous film to change phase to polycrystalline or microcrystalline silicon, depending upon specific processing conditions.

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First Claim