MICRO MIRRORS HAVING IMPROVED HINGES
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United States of America Patent
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Issued Date -
Oct 8, 2009
app pub date -
Apr 2, 2008
filing date -
Apr 2, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A micro mirror device includes a hinge supported upon a substrate. The hinge has a length and a width substantially parallel to an upper surface of the substrate, and has a thickness substantially perpendicular to the upper surface of the substrate. The thickness is larger than the width. A mirror plate is tiltable around the hinge. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position.
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