Multiple sheath multiple capillary aerosol jet

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United States of America Patent

PATENT NO 8887658
SERIAL NO

12247909

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Abstract

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Apparatus and method for depositing aerosolized material, wherein an aerosol flow is surrounded and focused by more than one consecutive sheath gas flows. The combined sheath and aerosol flows may consecutively flow through more than one capillary, thereby narrowing the flow further. Linewidths of less than one micron may be achieved.

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Patent Owner(s)

  • OPTOMEC, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Essien, Marcelino Cedar Crest, US 22 1421
King, Bruce H Albuquerque, US 22 1757

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