Method of manufacturing MEMS devices providing air gap control
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United States of America Patent
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May 31, 2011
Grant Date -
Nov 5, 2009
app pub date -
May 5, 2009
filing date -
Jun 30, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.
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