Vapor Phase Methods for Forming Electrodes in Phase Change Memory Devices

United States of America Patent

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Issued Date
Nov 5, 2009
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May 1, 2008
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May 1, 2008

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Abstract

, where M is a metal, R designates a ligand as indicated above and n is an integer corresponding to the number of ligands bonded to the central metal atom. M may be Ti, Ta, W, Nb, Mo, Pt, Cr, Co, Ni, or other transition metal.

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OVONYX INC	2956 WATERVIEW DRIVE ROCHESTER HILLS MI 48309

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Kamepalli, Smuruthi	Rochester , US	11	220
Lowrey, Tyler	Rochester Hills , US	149	5841

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Vapor Phase Methods for Forming Electrodes in Phase Change Memory Devices

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United States of America Patent

12113586

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12113586

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