POROUS SUBSTRATE HOLDER WITH THINNED PORTIONS
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United States of America Patent
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-
N/A
Issued Date -
Nov 12, 2009
app pub date -
May 6, 2008
filing date -
May 6, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate support system comprises a substrate holder for supporting a substrate. The substrate holder comprises a central portion sized and shaped to extend beneath most or all of a substrate supported on the substrate holder. The central portion has one or more recesses defining thinned portions of the central portion. The one or more thinned portions may comprise at least about 10% of an upper or lower surface of the central portion. The central portion is formed of a porous material, such as a material having a porosity between about 10-40%, configured to allow gas flow therethrough.
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Cited Art Landscape
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