Cryopump and method for diagnosing the cryopump
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United States of America Patent
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Dec 25, 2012
Grant Date -
Nov 19, 2009
app pub date -
May 13, 2009
filing date -
May 14, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A cryopump is provided with: a refrigerator that generates a cold state by a heat cycle in which an operating gas inhaled inside is expanded and discharged; a heat shield thermally connected to the refrigerator so as to be cooled to a target temperature; and a control unit that determines a command value for a heat cycle frequency such that a temperature of the heat shield follows the target temperature, and provides the command value to the refrigerator. The control unit estimates whether the refrigerator outputs a refrigerating capacity corresponding to the command value for the frequency based on a flow rate of the operating gas.
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