Section image acquiring method using combined charge particle beam apparatus and combined charge particle beam apparatus
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United States of America Patent
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Issued Date -
Nov 19, 2009
app pub date -
May 14, 2009
filing date -
May 15, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
There is constructed a constitution of including a mark image taking step of taking a reference mark image by subjecting a region other than an observation object section to EB scanning, a drift amount calculating step of calculating a current SEM drift amount with regard to a predetermined time point by comparing the taken reference mark image with a reference mark reference image, and an offset amount calculating step of calculating an offset amount of a current observation object section with regard to the predetermined time point prior to a section image taking step and taking a section image by correcting an EB scanning region at the predetermined time point based on the SEM drift amount and the offset amount at the section image taking step.
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