POLISHING COMPOSITION

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United States of America Patent

APP PUB NO 20090289217A1
SERIAL NO

12375325

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A polishing composition which achieves surfaces with high planarity and the reduction of corrosions in the wiring metal surface at the same time is provided.

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Patent Owner(s)

Patent OwnerAddress
SHOWA DENKO K KTOKYO 105-8518

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Yuji Shiojiri-shi , JP 305 3334
Sato, Takashi Shiojiri-shi , JP 973 9680
Shimazu, Yoshitomo Shiojiri-shi , JP 9 80
Takahashi, Hiroshi Shiojiri-shi , JP 866 11944

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