Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods
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United States of America Patent
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Nov 18, 2014
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Jun 8, 2009
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Mar 8, 2006
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Abstract
Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.
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