High-purity large-volume monocrystals that are especially radiation-resistant and method of making them from crystal

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United States of America Patent

SERIAL NO

12539795

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Abstract

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at a wavelength of 193 nm. Also they have RMS birefringence in the (100) direction or the (111) direction that is less than 0.35 nm/cm.

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Patent Owner(s)

Patent OwnerAddress
HELLMA MATERIALS GMBH & CO KG07745 JENA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guett, Rainer Bad Klosterlausnitz , DE 2 16
Kandler, Joerg Cospeda , DE 7 34
Menzel, Andreas Jena , DE 17 81
Mueller, Matthias Jena , DE 119 891
Weisleder, Andreas Tautenhain , DE 3 27

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