Spatial light modulator with structured mirror surfaces

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United States of America Patent

PATENT NO 8077377
APP PUB NO 20090303571A1
SERIAL NO

12430046

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to methods to improve SLMs, in particular to reflecting micromechanical SLMs, for applications with simple system architecture, high precision, high power handling capability, high throughput, and/or high optical processing capability. Applications include optical data processing, image projection, lithography, image enhancement, holography, optical metrology, coherence and wavefront control, and adaptive optics. A particular aspect of the invention is the achromatization of diffractive SLMs so they can be used with multiple wavelengths sequentially, simultaneously or as a result of spectral broadening in very short pulses.

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Patent Owner(s)

  • MICRONIC LASER SYSTEMS AB;MICRONIC MYDATA AB

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sandstrom, Torbjorn Pixbo, SE 95 2627

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