Micro and Nano-Structure Metrology
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United States of America Patent
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Issued Date -
Dec 10, 2009
app pub date -
Aug 8, 2006
filing date -
Aug 8, 2005
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Abandoned
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Abstract
Materials and methods for performing microscopy include applying a curable liquid polymer to a surface or structure to be characterized and polymerizing the polymer. The polymerized polymer represents a mold of the structure or surface and can be analyzed without disrupting the surface or structure needing characterization. The materials also do not leave a residue or otherwise alter a surface chemistry of the structure characterized.
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