Device for holding disk-shaped objects

United States of America Patent

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Issued Date
Dec 17, 2009
app pub date
Jun 4, 2009
filing date
Jun 11, 2008

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Abandoned

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Abstract

A device for holding disk-shaped objects, particularly semiconductor wafers, having at least three contact elements for depositing and/or fixing the disk-shaped object at its outer edge area. The contact elements are designed such that they have an incline facing the object and a supporting surface.

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Patent Owner(s)

Patent Owner	Address
VISTEC SEMICONDUCTOR SYSTEMS JENA GMBH	GOESCHWITZER STRASSE 25 JENA 07745

International Classification(s)

B23Q:DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TO....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Deutscher, Winfried	Jena , DE	3	33
Iffland, Thomas	Jena , DE	9	44
Schenck, Rene	Jena , DE	8	27

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Device for holding disk-shaped objects

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12455634

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12455634

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