SEMICONDUCTOR WAFER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20090311460A1
SERIAL NO

12478860

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Abstract

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A semiconductor wafer with high flatness is provided. The semiconductor wafer has a diameter φ of 450 mm and a thickness of at least 900 μm and no greater than 1,100 μm.

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Patent Owner(s)

Patent OwnerAddress
SUMCO CORPORATION2-1 SHIBAURA 1-CHOME MINATO-KU TOKYO 1058634
SUMCO TECHXIV CORPORATIONOMURA-SHI NAGASAKI 856-8555

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HASHII, Tomohiro Tokyo , JP 41 170
OHMACHI, Tomoko Nagasaki , JP 2 3
SAKAMOTO, Shinji Nagasaki , JP 31 248
TAKAISHI, Kazushige Tokyo , JP 49 236

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