System and method for generating spatial signatures

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United States of America Patent

PATENT NO 8254661
APP PUB NO 20090324055A1
SERIAL NO

12477061

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Abstract

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A system and method for performing spatial signature analysis, the system including a memory unit for storing wafer defect density maps of multiple resolutions, derived from a defect map obtained by an inspection tool; an analyzer for analyzing the wafer defect density maps to identify zones of interest; and a spatial signature generator for generating spatial signatures in response to relations between zones of interest of different density resolution.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTD9 OPPENHEIMER STREET PARK RABIN REHOVOT 7670109

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Auerbach, Ditza Aseret, IL 10 164

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