PROCESSES FOR PREPARING A CATALYST
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United States of America Patent
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Issued Date -
Jan 14, 2010
app pub date -
Sep 21, 2009
filing date -
Sep 21, 2007
priority date (Note) -
Abandoned
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Abstract
Processes for purifying silicon tetrafluoride source gas by subjecting the source gas to one or more purification processes including: contacting the silicon tetrafluoride source gas with an ion exchange resin to remove acidic contaminants, contacting the silicon tetrafluoride source gas with a catalyst to remove carbon monoxide, by removal of carbon dioxide by use of an absorption liquid, and by removal of inert compounds by cryogenic distillation; catalysts suitable for removal of carbon monoxide from silicon tetrafluoride source gas and processes for producing such catalysts.
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