MEASUREMENT APPARATUS AND METHOD
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United States of America Patent
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Issued Date -
Jan 28, 2010
app pub date -
Jul 21, 2009
filing date -
Jul 25, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
According to an aspect of the present invention, a method of controlling a measurement apparatus for determining a property of an individually controllable element of an array of individually controllable elements, the array of individually controllable elements being capable of controlling a distribution of a beam of radiation, is disclosed. The method includes, for a sequence of a plurality of individually controllable elements: directing a measurement beam of radiation at an individually controllable element of the plurality of individually controllable elements; and detecting the measurement beam once it has been re-directed by the individually controllable element, wherein the sequence in which the method is undertaken for the plurality of individually controllable elements is related to the orientation of the plurality of individually controllable elements when the plurality of individually controllable elements are oriented to control a distribution of a beam of radiation.
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