GRID HOLDER FOR STEM ANALYSIS IN A CHARGED PARTICLE INSTRUMENT
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United States of America Patent
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N/A
Issued Date -
Feb 4, 2010
app pub date -
Jul 31, 2009
filing date -
Aug 1, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A grid holder for STEM analysis in a charged-particle instrument has a base jaw and a pivoting jaw. Both jaws have a substantially congruent inclined portion. The base jaw has a flat portion for mounting the holder on the sample carousel of a charged-particle instrument, such as a dual beam FIB. The inclined portion of the jaws is inclined to the flat portion of the holder at an angle A approximately equal to the difference between 90 degrees and the angle between the electron beam and the ion beam in the charged-particle instrument. The inclined portion of the jaws has a pocket for receiving and holding a sample grid. When a sample is mounted on the grid and the grid is held by the grid holder, the sample will be correctly oriented for ion-beam thinning when the sample carousel is horizontal. The thinned sample may then be placed perpendicular to the electron beam for STEM analysis by tilting the sample carousel by the same angle A.
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