Variable-Size Load Port and Method for Operating the Same
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United States of America Patent
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N/A
Issued Date -
Feb 4, 2010
app pub date -
Jul 31, 2008
filing date -
Jul 31, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A variable-size load port includes a port door defined to cover an effective aperture of the load port. A vertical positioning device is connected to the port door to provide for controlled vertical positioning and movement of the port door without substantial horizontal movement of the port door. A seal plate is disposed above the port door. The seal plate is defined to form a proximity seal with an upper surface of the port door when the port door is vertically positioned in proximity to the seal plate. The seal plate is defined to be adjustable in a vertical direction.
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