Corrosion-resistant member and process for producing the same
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United States of America Patent
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Issued Date -
Feb 4, 2010
app pub date -
Oct 2, 2007
filing date -
Oct 6, 2006
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A corrosion-resistant member having a high acid resistance, plasma resistance, and hydrophilicity and a process for producing the corrosion-resistant member are provided. The corrosion-resistant member is obtained by surface-treating an untreated member (a ceramic, a metal) to a surface-treatment with a spray of a superheated water vapor having a temperature of 300 to 1000° C. The corrosion-resistant member may be a member contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.
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