METHOD OF CONTROLLING CONTAMINATION OF A SURFACE
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United States of America Patent
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Issued Date -
Feb 25, 2010
app pub date -
May 25, 2007
filing date -
Jun 13, 2006
priority date (Note) -
Abandoned
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Abstract
A method is described of controlling contamination of a surface exposed to a carbonaceous material and ionising radiation, such as EUV radiation, DUV radiation or electrons. The method comprises cyclically supplying to the surface a first gas comprising an oxidising species, for example NO, for reacting with carbonaceous deposits formed on the surface from the carbonaceous material, followed by a second gas comprising a reducing species, for example CO, for reacting with oxidising species on the surface.
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