Single-Sided Textured Sheet Wafer
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United States of America Patent
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Issued Date -
Mar 4, 2010
app pub date -
Aug 25, 2009
filing date -
Aug 29, 2008
priority date (Note) -
Abandoned
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Abstract
An apparatus for texturing two-sided wafers has a body capable of containing texturing chemistry (i.e., not necessarily containing the chemistry at this time), and a transport mechanism for transporting wafers through the texturing chemistry. The transport mechanism is configured to substantially wet no more than one side of wafers, transported through the body, with texturing chemistry.
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