Organic anti-reflective layer composition containing ring-opened phthalic anhydride and method for preparation thereof
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United States of America Patent
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Issued Date -
Mar 4, 2010
app pub date -
Jan 15, 2009
filing date -
Aug 26, 2008
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Abandoned
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Abstract
A light absorbent for forming an organic anti-reflective layer, represented by the following formula 1 or formula 2, is provided:each independently represent a hydrogen atom, a halogen atom, a substituted or unsubstituted alkyl group a substituted or unsubstituted aryl group, a substituted or unsubstituted acetal group, or a substituted or unsubstituted hydroxyl group; and n is an integer from 2 to 500.
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