ANTIVIBRATION MECHANISM FOR ARTICLE RECEIVING CONTAINER
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United States of America Patent
Stats
-
N/A
Issued Date -
Mar 18, 2010
app pub date -
Oct 31, 2006
filing date -
Oct 31, 2005
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An object is to restrict vibration from being transmitted to a shelf member and thus to prevent a substrate supported on the shelf member from being damaged. An FOUP main body 3a is formed into a member separated from a shelf member 3e provided in the FOUP main body 3a, and then an elastic member 3g is interposed between the FOUP main body 3a and the shelf member 3e, thereby allowing the shelf member 3e to be elastically supported to the FOUP main body 3a.
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Cited Art Landscape
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