POST-LENS STEERING OF A LASER BEAM FOR MICRO-MACHINING APPLICATIONS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20100078419A1
SERIAL NO

12238929

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Abstract

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In a laser micro-machining system including a simple focusing lens located between a laser source and a beam steering mechanism along the path of a laser beam pulse. The focusing lens being a simple single-element spherical lens with an optical axis of the focusing lens located inline with a laser beam input from the laser source. The focusing lens located further away from a work piece than the beam steering mechanism. An active beam path management system moves the simple focusing lens in concert with and relative to the beam steering mechanism to maintain a focal point coincident with a surface of the work piece at all deflection angles affected by the beam steering mechanism. The focusing lens is rapidly moveable in concert with the beam steering mechanism to maintain a constant beam path length from the lens output to the work piece at all times.

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Patent Owner(s)

Patent OwnerAddress
ELECTRO SCIENTIFIC INDUSTRIES INC13900 NW SCIENCE PARK DRIVE PORTLAND OR 97229

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ALPAY, Mehmet Ermin Portland, US 2 7
HOWERTON, Jeff Portland, US 8 78
JOHANSEN, Brian Portland, US 17 250

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