Importance

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Abstract

A direct load system and conveyor is disclosed. The direct load system includes a load port for moving containers in a vertical orientation between a lower position near the conveyor and up to an upper position proximate to a load port door. The load port includes a single arm that moves a support in a vertical configuration, such that moving the single arm allows for the support to be lowered to the conveyor in a nested location between beams of the conveyor. The conveyor includes a single slot in a beam that allows the single arm to pass, and allows the support to be placed in the nested location, which is below a conveyor path defined by the belts of the conveyor. If a container is to be lifted off of the belts, the single arm raises up from the nested location, to then raise the container up and off of the conveyor and to the load port door. The single arm and interface with the conveyor slot can be used by other tools, such as stockers or tools that need to directly access a conveyor used to transport containers (e.g., wafers, etc.) to locations/tools of a fabrication facility. In alternate embodiments, it is possible to replace the belt with conveying wheels.

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First Claim