Lithographic apparatus and device manufacturing method utilizing a substrate handler

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United States of America Patent

PATENT NO 8411252
APP PUB NO 20100085553A1
SERIAL NO

12639457

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Abstract

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A substrate handler is provided. The substrate handler includes a support surface configured to carry a substrate and a pre-conditioning unit configured to pre-condition the substrate. The substrate handler is configured to move the substrate relative to a substrate table.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jacobs, Hernes Eindhoven, NL 41 209
Luttikhuis, Bernardus Antonius Johannes Nuenen, NL 25 452
Van, Der Schoot Harmen Klaas Vught, NL 46 694
Vosters, Petrus Matthijs Henricus Bladel, NL 17 124

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