US Patent Application No: 2010/0086,383

Number of patents in Portfolio can not be more than 2000

VACUUM PROCESSING APPARATUS

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ALSO PUBLISHED AS: 8075691
ATTORNEY / AGENT: (SPONSORED)
 

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Abstract

Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ADVANCED DISPLAY PROCESS ENGINEERING CO., LTD.KYUNGGI-DO20

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Jun Young Taejon, KR 47 75
Han, Myung-Woo Seoul, KR 9 25
Kim, Gyeong-Hoon Anyang-shi, KR 11 35
Kim, Hyung-Soo Seoul, KR 128 85
Lee, Jeong-Bin Yongin City, KR 10 22
Lee, Young Jong Daejeon, KR 35 115
Son, Hyoung-Kyu Gangbuk-gu, KR 13 25

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
ADVANCED DISPLAY PROCESS ENGINEERING CO., LTD. (4)
8,349,082 Vacuum processing apparatus 0 2009
8,187,384 Vacuum processing apparatus 1 2009
8,152,926 Vacuum processing apparatus 1 2009
8,075,691 Vacuum processing apparatus 3 2009