
US Patent Application No: 2010/0086,383
Number of patents in Portfolio can not be more than 2000
VACUUM PROCESSING APPARATUS
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Apr 8, 2010
Publication date -
Oct 14, 2009
filing date -
12/578,918
serial no -
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Abstract
Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.
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