Semiconductor device manufacturing method and semiconductor device manufacturing apparatus

United States of America Patent

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Jan 24, 2012
Grant Date
Apr 22, 2010
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Oct 16, 2009
filing date
Oct 21, 2008

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plasma process.

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TOKYO ELECTRON LIMITED

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Asako, Ryuichi	Yamanashi, JP	38	104
Shiraishi, Gousuke	Tokyo, JP	12	34
Tahara, Shigeru	Yamanashi, JP	55	782

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Semiconductor device manufacturing method and semiconductor device manufacturing apparatus

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United States of America Patent

12580495

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PATENT NO	8101507
APP PUB NO	20100099256A1
SERIAL NO	12580495
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 24, 2012	US,8101507,B2 US8101507B2	GRANTED PATENT AS SECOND PUBLICATION
April 22, 2010	US,20100099256,A1 US20100099256A1	FIRST PUBLISHED PATENT APPLICATION

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12580495

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