High-scan rate positioner for scanned probe microscopy
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United States of America Patent
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Jan 22, 2013
Grant Date -
Apr 22, 2010
app pub date -
Oct 17, 2009
filing date -
Oct 17, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half.
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