APPARATUS FOR MOVING AN OBJECT IN NANOMETER AND METHOD THEREOF
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United States of America Patent
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Issued Date -
Apr 29, 2010
app pub date -
Sep 13, 2006
filing date -
Sep 14, 2005
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
When the actuator expands, the actuator lever actuates the second parallelogram at the center or middle of its column length. This causes the displacement of both the parallelograms. Since the two parallelograms are perpendicular to each other, perpendicular deflection is reduced. Actuating at the center of the parallelogram length with amplification lever reduces the arcuate motion and linear displacement of the moving stage is obtained in the nanopositioner.
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Cited Art Landscape
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