SUBSTRATE HOLDER WITH VARYING DENSITY
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United States of America Patent
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N/A
Issued Date -
May 6, 2010
app pub date -
Nov 6, 2008
filing date -
Nov 6, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A substrate support system comprises a substrate holder for supporting a substrate. The substrate holder comprises an interior portion sized and shaped to extend beneath most or all of a substrate supported on the substrate holder. The substrate holder has mass density that varies, preferably in order to compensate for variations in substrate temperature owing to surface geometry variations of the interior portion, so as to provide a more uniform thermal coupling between the substrate and substrate holder. The substrate holder is preferably configured to be spaced further apart from a substrate at the center than at the outer perimeter.
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