Importance

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Abstract

At the frequency of natural vibration with which the driving tines and detection tine of a piezoelectric vibrator resonate, the vibration directions of natural vibrations and the frequency difference between the resonance frequencies are set to reduce the leakage of vibration from the driving tines to the detection tine for suppressing the leakage vibration of the piezoelectric vibrator. In the piezoelectric vibrator, the vibration direction of the driving tines is made orthogonal to the vibration direction of the detection tine, or the frequency difference between the resonance frequency of the driving tines in the in-plane direction and the resonance frequency of the driving tines in the out-of-plane direction is increased sufficiently to suppress the growth of the leakage vibration. This configuration makes the piezoelectric vibrator compact and reduces leakage vibrations.

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First Claim