MICROSCOPE HAVING MULTIPLE IMAGE-OUTPUTTING DEVICES AND PROBING APPARATUS FOR INTEGRATED CIRCUIT DEVICES USING THE SAME
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United States of America Patent
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app pub date -
Jan 19, 2010
filing date -
Nov 21, 2007
priority date (Note) -
Abandoned
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Abstract
A microscope includes an object splitter configured to split the object image into a first optical path and a second optical path, a first imaging module positioned on the first path and a second imaging module positioned on the second path. The object splitter includes a first beam splitter configured to direct an illumination light to an object, an objective lens configured to collect the reflected light from the object and couple the reflected light on the first beam splitter, and a second beam splitter configured to split the reflected light into the first optical path and the second optical path, wherein the distance between the object and the objective lens is constant. The first imaging module includes a first close up lens configured to render a first object image to a first imaging device with auto-focusing and remote-zooming capabilities, and the second imaging module includes a second close up lens and a negative lens configured to render a second object image to a second imaging device with auto-focusing and remote-zooming capabilities.
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