METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20100119144A1
SERIAL NO

12692018

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
KLA-TENCOR TECHNOLOGIES CORPORATIONMILPITAS, CA685

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Duffy, Brian San Jose, US 27 761
Kulkarni, Ashok San Jose, US 20 964
Maayah, Kais Cupertino, US 6 443
Rouse, Gordon Dublin, US 4 400

Cited Art Landscape

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