US Patent Application No: 2010/0119,144

Number of patents in Portfolio can not be more than 2000

METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
KLA-TENCOR TECHNOLOGIES CORPORATIONMILPITAS, CA721

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Duffy, Brian San Jose, US 25 628
Kulkarni, Ashok San Jose, US 19 820
Maayah, Kais Cupertino, US 6 371
Rouse, Gordon Dublin, US 4 334

Cited Art Landscape

Patent Info (Count) # Cites Year
 
MINNESOTA MINING AND MANUFACTURING COMPANY (1)
* 5,694,478 Method and apparatus for detecting and identifying microbial colonies 61 1994
 
TRANSPACIFIC BLUETOOTH, LLC (1)
* 5,940,458 Method and compensating for time error of time/frequency generator using global positioning system 38 1998
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (2)
* 6,078,738 Comparing aerial image to SEM of photoresist or substrate pattern for masking process characterization 119 1997
* 7,114,143 Process yield learning 19 2003
 
MEDIATEK INC. (1)
* 5,497,381 Bitstream defect analysis method for integrated circuits 122 1995
 
Micron Technology, Inc. (1)
* 5,884,242 Focus spot detection method and system 41 1997
 
MARKEM CORPORATION (1)
* 4,734,721 Electrostatic printer utilizing dehumidified air 46 1985
 
DAINIPPON SCREEN MFG. CO., LTD. (1)
* 4,799,175 System for inspecting pattern defects of printed wiring boards 107 1985
 
TRIPATH IMAGING, INC. (1)
* 5,621,519 Imaging system transfer function control method and apparatus 58 1995
 
KLA Instruments Corporation (16)
* 4,448,532 Automatic photomask inspection method and system 96 1981
* 4,579,455 Photomask inspection apparatus and method with improved defect detection 180 1983
* 4,532,650 Photomask inspection apparatus and method using corner comparator defect detection algorithm 176 1983
* 4,555,798 Automatic system and method for inspecting hole quality 136 1983
* 4,633,504 Automatic photomask inspection system having image enhancement means 122 1984
* 4,805,123 Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems 213 1986
* 4,758,094 Process and apparatus for in-situ qualification of master patterns used in patterning systems 58 1987
* 4,926,489 Reticle inspection system 198 1987
* 4,845,558 Method and apparatus for detecting defects in repeated microminiature patterns 152 1987
* 4,877,326 Method and apparatus for optical inspection of substrates 179 1988
* 5,572,598 Automated photomask inspection apparatus 189 1994
* 5,563,702 Automated photomask inspection apparatus and method 217 1994
* 5,578,821 Electron beam inspection system and method 236 1995
* 5,737,072 Automated photomask inspection apparatus and method 138 1996
* 5,889,593 Optical system and method for angle-dependent reflection or transmission measurement 237 1997
* 5,991,699 Detecting groups of defects in semiconductor feature space 237 1997
 
HITACHI, LTD. (1)
* 5,986,263 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same 98 1997
 
KLA-TENCOR CORPORATION (3)
* 6,052,478 Automated photomask inspection apparatus 103 1996
* 6,076,465 System and method for determining reticle defect printability 73 1997
* 6,097,887 Software system and method for graphically building customized recipe flowcharts 104 1997
 
Kirin Techno-System Corporation (1)
* 5,444,480 Method of inspecting solid body for foreign matter 38 1993
 
KLA-TENCOR TECHNOLOGIES CORPORATION (1)
* 7,739,064 Inline clustered defect reduction 21 2003
 
KEITHLEY INSTRUMENTS, INC. (7)
* 5,594,247 Apparatus and method for depositing charge on a semiconductor wafer 80 1995
* 6,097,196 Non-contact tunnelling field measurement for a semiconductor oxide layer 79 1997
* 6,072,320 Product wafer junction leakage measurement using light and eddy current 74 1997
* 6,104,206 Product wafer junction leakage measurement using corona and a kelvin probe 126 1997
* 5,834,941 Mobile charge measurement using corona charge and ultraviolet light 56 1997
* 6,060,709 Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer 48 1997
* 6,091,257 Vacuum activated backside contact 46 1998
 
PICKER INTERNATIONAL, INC. (1)
* 4,817,123 Digital radiography detector resolution improvement 85 1986
 
UNIVERSITY OF ROCHESTER (1)
* 5,453,844 Image data coding and compression system utilizing controlled blurring 65 1993
 
Smithley Instruments, Inc. (1)
* 5,767,693 Method and apparatus for measurement of mobile charges with a corona screen gun 82 1996
 
RENESAS ELECTRONICS CORPORATION (1)
* 5,481,624 Mask inspecting method and mask detector 69 1993
 
PHOTON DYNAMICS, INC. (1)
* 5,754,678 Substrate inspection apparatus and method 54 1996
 
INDUSTRIAL IMAGING, INCORPORATION (1)
* 4,578,810 System for printed circuit board defect detection 96 1983
 
CLEMSON UNIVERSITY (1)
* 5,822,218 Systems, methods and computer program products for prediction of defect-related failures in integrated circuits 119 1996
 
Bell Telephone Laboratories, Incorporated (1)
* 4,595,289 Inspection system utilizing dark-field illumination 98 1984
 
GOOGLE INC. (1)
* 5,965,306 Method of determining the printability of photomask defects 107 1997
 
UNIPHASE CORPORATION (1)
* 6,104,835 Automatic knowledge database generation for classifying objects and systems therefor 93 1997
 
TENCOR INSTRUMENTS (9)
* 4,378,159 Scanning contaminant and defect detector 135 1981
* 4,641,967 Particle position correlator and correlation method for a surface scanner 73 1985
* 4,766,324 Particle detection method including comparison between sequential scans 98 1987
* 5,189,481 Particle detector for rough surfaces 157 1991
* 5,355,212 Process for inspecting patterned wafers 111 1993
* 5,948,972 Dual stage instrument for scanning a specimen 77 1996
* 5,866,806 System for locating a feature of a surface 50 1996
* 5,852,232 Acoustic sensor as proximity detector 137 1997
* 5,955,661 Optical profilometer combined with stylus probe measurement device 85 1997
 
RAYTHEON COMPANY (1)
* 5,874,733 Convergent beam scanner linearizing method and apparatus 60 1997
 
SEMILAB SEMICONDUCTOR PHYSICS LABORATORY, CO., LTD. (1)
* 5,661,408 Real-time in-line testing of semiconductor wafers 84 1995
 
Canon Kabushiki Kaisha (1)
* 4,814,829 Projection exposure apparatus 103 1987
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (9)
* 4,599,558 Photovoltaic imaging for large area semiconductors 93 1983
* 4,812,756 Contactless technique for semicondutor wafer testing 140 1987
* 5,124,927 Latent-image control of lithography tools 159 1990
* 5,544,256 Automated defect classification system 250 1993
* 5,608,538 Scan line queuing for high performance image correction 50 1994
* 5,644,223 Uniform density charge deposit source 84 1995
* 5,485,091 Contactless electrical thin oxide measurements 103 1995
* 5,771,317 Image resize using sinc filter in linear lumen space 47 1996
* 5,795,685 Simple repair method for phase shifting masks 72 1997
 
ADVANCED MICRO DEVICES, INC. (4)
* 5,917,332 Arrangement for improving defect scanner sensitivity and scanning defects on die of a semiconductor wafer 56 1996
* 5,742,658 Apparatus and method for determining the elemental compositions and relative locations of particles on the surface of a semiconductor wafer 64 1996
* 5,999,003 Intelligent usage of first pass defect data for improved statistical accuracy of wafer level classification 42 1997
* 6,040,912 Method and apparatus for detecting process sensitivity to integrated circuit layout using wafer to wafer defect inspection device 28 1998
 
Nikon Corporation (2)
* 5,046,109 Pattern inspection apparatus 92 1990
* 6,117,598 Scanning exposure method with alignment during synchronous movement 31 1998
 
LUCENT TECHNOLOGIES INC. (1)
* 6,011,404 System and method for determining near--surface lifetimes and the tunneling field of a dielectric in a semiconductor 92 1997
 
GLOBALFOUNDRIES INC. (3)
* 5,767,691 Probe-oxide-semiconductor method and apparatus for measuring oxide charge on a semiconductor wafer 68 1995
* 5,650,731 Photovoltaic oxide charge measurement probe technique 81 1996
* 5,932,377 Exact transmission balanced alternating phase-shifting mask for photolithography 56 1998
 
GSI LUMONICS CORPORATION (1)
* 4,928,313 Method and system for automatically visually inspecting an article 63 1989
 
FUJITSU LIMITED (1)
* 4,641,353 Inspection method and apparatus for a mask pattern used in semiconductor device fabrication 54 1984
 
THERMA-WAVE, INC. (1)
* 5,619,548 X-ray thickness gauge 136 1995
 
Ultrapointe Corporation (1)
* 5,980,187 Mechanism for transporting semiconductor-process masks 65 1997
 
HER MAJESTY THE QUEEN AS REPRESENTED BY THE MINISTER OF NATIONAL DEFENCE OF HER MAJESTY'S CANADIAN GOVERNMENT (1)
* 5,774,179 Method and system for fast microscanning 46 1995
 
APPLIED MATERIALS, INC. (1)
* 5,689,614 Rapid thermal heating apparatus and control therefor 102 1995
 
Texas Instruments Incorporated (7)
* 5,528,153 Method for non-destructive, non-contact measurement of dielectric constant of thin films 46 1994
* 5,703,969 System and method for recognizing visual indicia 33 1996
* 5,696,835 Apparatus and method for aligning and measuring misregistration 63 1996
* 6,246,787 System and method for knowledgebase generation and management 79 1997
* 6,205,239 System and method for circuit repair 110 1997
* 6,091,846 Method and system for anomaly detection 143 1997
* 6,014,461 Apparatus and method for automatic knowlege-based object identification 70 1997
 
UNIVERSITY OF SOUTH FLORIDA (1)
* 5,773,989 Measurement of the mobile ion concentration in the oxide layer of a semiconductor wafer 89 1995
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
* 2011/0167,397 SYSTEM AND METHOD FOR MULTI-EXPOSURE PATTERN DECOMPOSITION 8 2010
 
SCREEN HOLDINGS CO., LTD. (1)
* 2013/0057,552 DRAWING APPARATUS AND DRAWING METHOD 0 2012
 
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION (2)
* 8,312,395 Automatic identification of systematic repeating defects in semiconductor production 0 2011
* 2012/0023,464 AUTOMATIC IDENTIFICATION OF SYSTEMATIC REPEATING DEFECTS IN SEMICONDUCTOR PRODUCTION 1 2011
 
Elitetech Technology Co., Ltd. (2)
* 8,312,401 Method for smart defect screen and sample 0 2011
* 2012/0185,818 METHOD FOR SMART DEFECT SCREEN AND SAMPLE 1 2011
 
CAMTEK LTD. (1)
* 9,418,413 System and a method for automatic recipe validation and selection 0 2010
 
Cadence Design Systems, Inc. (4)
8,209,656 Pattern decomposition method 13 2008
* 8,151,219 System and method for multi-exposure pattern decomposition 7 2010
8,516,402 Method and apparatus for automatically fixing double patterning loop violations 9 2011
8,473,874 Method and apparatus for automatically fixing double patterning loop violations 12 2011
 
RUDOLPH TECHNOLOGIES, INC. (1)
9,406,115 Scratch detection method and apparatus 0 2011
 
GLOBALFOUNDRIES INC. (5)
* 8,515,724 Technology computer-aided design (TCAD)-based virtual fabrication 2 2010
* 2011/0313,747 Technology Computer-Aided Design (TCAD)-Based Virtual Fabrication 5 2010
8,539,421 Layout-specific classification and prioritization of recommended rules violations 0 2011
* 8,849,440 Manufacturing control based on a final design structure incorporating both layout and client-specific manufacturing information 0 2012
* 8,548,788 Technology computer-aided design (TCAD)-based virtual fabrication 0 2012
 
KLA-TENCOR CORPORATION (8)
* 8,718,353 Reticle defect inspection with systematic defect filter 1 2012
* 9,087,367 Determining design coordinates for wafer defects 0 2012
* 2013/0064,442 Determining Design Coordinates for Wafer Defects 6 2012
9,189,844 Detecting defects on a wafer using defect-specific information 1 2012
* 9,318,395 Systems and methods for preparation of samples for sub-surface defect review 0 2012
* 2013/0137,193 SYSTEMS AND METHODS FOR PREPARATION OF SAMPLES FOR SUB-SURFACE DEFECT REVIEW 0 2012
* 9,224,195 Reticle defect inspection with systematic defect filter 0 2014
* 2014/0205,179 RETICLE DEFECT INSPECTION WITH SYSTEMATIC DEFECT FILTER 0 2014
 
HERMES MICROVISION, INC. (1)
* 2012/0314,054 METHOD AND MACHINE FOR EXAMINING WAFERS 1 2012
 
HITACHI HIGH-TECHNOLOGIES CORPORATION (4)
* 8,767,038 Method and device for synthesizing panorama image using scanning charged-particle microscope 3 2009
* 2011/0181,688 METHOD AND DEVICE FOR SYNTHESIZING PANORAMA IMAGE USING SCANNING CHARGED-PARTICLE MICROSCOPE 3 2009
* 8,953,868 Defect inspection method and defect inspection apparatus 0 2013
* 2013/0322,737 DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS 0 2013
 
MENTOR GRAPHICS CORPORATION (2)
* 8,930,782 Root cause distribution determination based on layout aware scan diagnosis results 0 2012
* 2012/0297,264 Root Cause Distribution Determination Based On Layout Aware Scan Diagnosis Results 2 2012
 
APPLIED MATERIALS, INC. (2)
* 8,527,081 Method and apparatus for automated validation of semiconductor process recipes 0 2011
* 2012/0053,719 METHOD AND APPARATUS FOR AUTOMATED VALIDATION OF SEMICONDUCTOR PROCESS RECIPES 0 2011
 
APPLIED MATERIALS ISRAEL, LTD. (6)
* 8,254,661 System and method for generating spatial signatures 1 2009
* 2009/0324,055 SYSTEM AND METHOD FOR GENERATING SPATIAL SIGNATURES REFERENCE TO RELATED APPLICATIONS 1 2009
* 9,098,893 System, method and computer program product for classification within inspection images 0 2011
* 2013/0163,851 SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CLASSIFICATION WITHIN INSPECTION IMAGES 1 2011
8,553,970 System and method for generating spatial signatures 0 2012
* 9,235,885 System, a method and a computer program product for patch-based defect detection 0 2013
* Cited By Examiner