METHOD FOR ELECTRON BACK-ILLUMINATION OF A SEMICONDUCTOR IMAGE SENSOR

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United States of America Patent

APP PUB NO 20100123082A1
SERIAL NO

12621224

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method is disclosed for acquiring an image in a sensor having a substrate side and a front side comprising illuminating the semiconductor image sensor with electrons that approach the sensor from the substrate side.

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Patent Owner(s)

Patent OwnerAddress
GATAN INC1100 CASSATT ROAD BERWYN PA 19312

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mooney, Paul Pleasanton, US 18 143

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