Importance

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Abstract

The robot device according to this invention includes an arm mechanism, multiple hand mechanisms, and a control unit. The arm mechanism has its base end rotatably supported on a base point set in a predetermined position in the horizontal plane, and its free end moves among orthogonal coordinates in the horizontal plane. Each of the multiple hand mechanisms has its support end rotatably supported by the free end, and its holding end moves among polar coordinates in the horizontal plane. The holding ends hold substrates. The control unit drives the arm mechanism so that the free end approaches a base line connecting a base point with the center of a stage without passing over the base point, and drives the multiple hand mechanisms so that an export holding end moves along the base line and a non-export holding end separates from the export holding end.

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First Claim