Process For Manufacturing Contact Elements For Probe Card Assembles

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United States of America Patent

APP PUB NO 20100140793A1
SERIAL NO

12470971

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A process for making contact elements for a probe card assembly includes steps of forming a first continuous trench in a substrate along a first direction, and forming simultaneously a plurality of tip structures adjacent one to another in the first continuous trench in a second direction substantially normal to the first direction, each of the tip structures being part of, or adapted to be part of at least one corresponding contact element capable of forming an electrical contact with a terminal of an electronic device.

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Patent Owner(s)

Patent OwnerAddress
FORMFACTOR INC7005 SOUTHFRONT ROAD LIVERMORE CA 94551

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fan, Li San Ramon, US 180 1510
Gritters, John K Livermore, US 23 276

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