Nodular Silica Sol and Method of Producing the Same

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Aug 1, 2006
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Aug 10, 2005

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Abstract

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A novel nodular silica sol adapted to use as a polishing material for polishing, for instance, CMP.respectively.

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Patent Owner	Address
JGC CATALYSTS AND CHEMICALS LTD	16F SOLID SQUARE E BLDG 580 HORIKAWA-MACHI SAIWAI-KU KAWASAKI-CITY KANAGAWA 212-0013

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Inventor Name	Address	# of filed Patents	Total Citations
Nakashima, Akira	Fukuoka, JP	74	959
Nakayama, Kazuhiro	Fukuoka, JP	33	232
Nishida, Hiroyasu	Fukuoka, JP	36	264
Wakamiya, Yoshinori	Fukuoka, JP	20	145

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Nodular Silica Sol and Method of Producing the Same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11990111

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11990111

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