Elevator-based tool loading and buffering system
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United States of America Patent
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app pub date -
Jan 29, 2010
filing date -
Aug 24, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.
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