ILLUMINATION METHODS AND SYSTEMS FOR LASER SCRIBE DETECTION AND ALIGNMENT IN THIN FILM SOLAR CELL FABRICATION
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United States of America Patent
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Issued Date -
Jun 24, 2010
app pub date -
Dec 18, 2009
filing date -
Dec 19, 2008
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Abandoned
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Abstract
Combined illumination is used to detect the positions of features such as scribe lines in different layers of a workpiece. Because combinations of layers of different material can scatter, reflect, scatter, and/or transmit light in different ways, combining and adjusting such illumination can allow positions of multiple features to be detected concurrently, such that the position of a feature being formed in one layer can be adjusted to a relative position with respect to a feature in another layer, even where those layers are of different materials with different optical properties.
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