Methods, systems and apparatus for rapid exchange of work material
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United States of America Patent
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Nov 11, 2014
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app pub date -
Jan 8, 2010
filing date -
Jan 11, 2009
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Abstract
Systems, apparatus and methods for the rapid exchange of work material in a facility processing substrates (e.g., LCD panels, solar panels, semiconductor wafers, or the like) are disclosed. The system may include load ports associated with a process tool, local storage units, and a work material exchange apparatus adapted to rapidly exchange work material at the ports, units, or other exchange locations. The work material exchange apparatus may include two or more end effectors coupled to one or more actuator members and which may be adapted to rapidly exchange two or more carriers containing work material at an exchange location.
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