Miniature MEMS condenser microphone packages and fabrication method thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8325951
APP PUB NO 20100183181A1
SERIAL NO

12689283

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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MEMS microphone packages and fabrication methods thereof are disclosed. A MEMS microphone package includes a cavity that houses a MEMS sensing element, an IC chip and other passive elements supported by a common substrate. The cavity is formed by a top cover member, a housing wall surrounds and supports the top cover member and the common substrate supports the housing wall. A conductive casing encloses and surrounds the cavity, and is electrically connected to a common analog ground lead on a PCB board. The top cover member and the housing wall are non-conductive. And the conductive casing is not connected directly to the ground leads of the package. An acoustic absorption layer is sandwiched between the conductive casing and the cavity which is formed by the top cover member, the housing wall and the substrate.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
NEOMEMS TECHNOLOGIES, INC., WUXI, CHINAWUXI JIANGSU PROVINCE, CN5

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Yunlong Sunnyvale, US 21 216

Cited Art Landscape

Patent Info (Count) # Cites Year
 
SHARP KABUSHIKI KAISHA (1)
6870937 Electroacoustic transducer, process of producing the same and electroacoustic transducing device using the same 16 2000
 
MONTEREY RESEARCH, LLC (1)
7409616 Built in self test system and method for detecting and correcting cycle slip within a deserializer 9 2004
 
KNOWLES ELECTRONICS, LLC (3)
6535460 Miniature broadband acoustic transducer 105 2001
6781231 Microelectromechanical system package with environmental and interference shield 228 2002
7434305 Method of manufacturing a microphone 78 2004
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (3)
5619476 Electrostatic ultrasonic transducer 91 1994
5894452 Microfabricated ultrasonic immersion transducer 95 1996
6493288 Wide frequency band micromachined capacitive microphone/hydrophone and method 18 2000
 
The Charles Stark Draper Laboratory, Inc. (2)
5146435 Acoustic transducer 169 1989
5452268 Acoustic transducer with improved low frequency response 185 1994
 
TDK CORPORATION (1)
* 7466834 Electret condenser microphone 21 2005
 
The United States of America as represented by the Secretary of the Navy (1)
5870351 Broadband microfabriated ultrasonic transducer and method of fabrication 113 1996
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
KNOWLES ELECTRONICS, LLC (2)
* 8457332 Microphone and orientation sensor assembly 8 2010
* 2010/0172,518 MICROPHONE AND ORIENTATION SENSOR ASSEMBLY 2 2010
 
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC. (1)
* 9554212 Capacitive microphone with integrated cavity 0 2014
 
RED TAIL HAWK CORPORATION (3)
* 9084053 Microphone environmental protection device 4 2013
* 2014/0198,932 Microphone Environmental Protection Device 0 2013
9609411 Microphone environmental protection device 0 2015
* Cited By Examiner

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