FILM FORMATION APPARATUS

United States of America Patent

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Issued Date
Jul 29, 2010
app pub date
Apr 30, 2008
filing date
Jun 25, 2007

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Abandoned

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Abstract

so that respective substrates W are positioned at film formation positions where concave film formation surfaces S thereof face the erosion area.

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Patent Owner(s)

Patent Owner	Address
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL LTD )	2-4 WAKINOHAMA-KAIGANDORI 2-CHOME CHUO-KU KOBE-SHI HYOGO 651-8585

International Classification(s)

C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Tamagaki, Hiroshi	Hyogo, JP	43	362

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FILM FORMATION APPARATUS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12663977

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12663977

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Family

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