Method for microcontact printing of MEMS
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United States of America Patent
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Jun 3, 2014
Grant Date -
Jul 29, 2010
app pub date -
Dec 13, 2009
filing date -
Dec 16, 2008
priority date (Note) -
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Abstract
The embodiments disclosed herein are directed to fabrication methods useful for creating MEMS via microcontact printing by using small organic molecule release layers. The disclose method enables transfer of a continuous metal film onto a discontinuous platform to form a variable capacitor array. The variable capacitor array can produce mechanical motion under the application of a voltage. The methods disclosed herein eliminate masking and other traditional MEMS fabrication methodology. The methods disclosed herein can be used to form a substantially transparent MEMS having a PDMS layer interposed between an electrode and a graphene diaphragm.
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