Deposition of Chalcogenide Materials via Vaporization Process
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United States of America Patent
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Issued Date -
Aug 12, 2010
app pub date -
Feb 12, 2009
filing date -
Feb 12, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of depositing a chalcogenide material. The method includes vaporizing a condensed phase chalcogenide source material and forming a product chalcogenide material on a remote deposition surface by condensing the vapor. Vaporization may occur via sublimation or evaporation and the condensed phase chalcogenide source material may be a solid-phase source material or a liquid-phase source material. The deposition surface may include a patterned feature such as a hole, trench or other opening and the method provides for conformal or nearly conformal filling of the feature. The composition of the product chalcogenide material closely corresponds to the composition of the chalcogenide source material.
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