APPARATUS AND METHOD FOR SUBSTRATE HANDLING
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United States of America Patent
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Issued Date -
Aug 12, 2010
app pub date -
Jun 5, 2008
filing date -
Jun 5, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A system for substrate handling proposed, comprising an optical local tilt detector, a plurality of arms each having vertically extended movable along vertical axis fingers to contact the edge of a substrate, wherein at least one of the arms has a linear actuator moveable arm and each of the fingers provided by z-axis miniature linear actuator; and a control unit connected to said tilt detector and said z-axis linear actuators enabling measuring and correcting of local tilt.
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